In order to separate the permanent gases from low carbon hydrocarbons,agas chromatography(GC)column packed with porapak Q as stationary phase was fabricated based on MEMS technology.In this work,the channels on the glass wafer and the silicon wafer were fabricated by a laser etching technology(LET).LET is an effective method to etch a deep channels on the glass wafer as well as on the silicon wafer,so the depth of the channels can be substantially increased by bonding the channels on the silicon together wi...
【基金】
supported by National Natural Science Foundation of China(61176112,60976088);
Beijing science and technology plan project(Z141100003414003)
【更新日期】
2016-05-25
【分类号】
O657.71
【正文快照】
[ The gas mixtures separated by micro-fabricated GC columns are predominantly VOCs gaseous1-11]as it isvery difficult to uniformly fill chromatographic packing in the folding or bending shallow channels,In orderto separate
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