【摘要】 基于MEMS工艺的新型阵列化薄膜体声波谐振器(FBAR),可实现对多种挥发性气体的高通量检测.本文通过对薄膜体声波谐振器表面进行不同的化学官能团修饰,形成了传感器阵列,挥发性气体可以在不同化学官能团修饰的器件界面进行选择性沉积,通过监测传感器的谐振频率变化,形成气体响应的特征条形码,由此实现了对不同挥发性气体更加准确的检测.相对于传统的气体检测手段,由于采用了MEMS工艺,该传感器具备体积小巧、反应快捷、灵敏度高等优势,同时通过多化学官能团修饰的阵列化传感器可以实现一套传感装置对不同气体的检测,大大提高了气体检测的效率、识别能力和准确性.更多还原

【Abstract】 The thin film bulk acoustic resonator( FBAR) array based on MEMS can realize high throughput detection in sensing a variety of volatile gases. In this paper,by virtue of modifying the surface of film bulk acoustic resonators with different functional groups to form sensor array,the volatile gas can interact differently with different chemical functional groups in this array. By monitoring the resonant frequency shift of the sensor,the bar code of the characteristics of the gas response was formed,which can achieve a more accurate detection of different volatile gases. Compared with traditional gas detection methods,the sensor array has the advantage of small size,fast response and high sensitivity due to the MEMS technology. At the same time,the sensor array can detect various volatile gases by modifying the chemical groups,greatly improving the efficiency of gas detection,recognition capability and accuracy.更多还原