【摘要】 为提高圆孔的光学显微测量准确性,研究了基于超分辨图像复原的显微圆孔孔径测量方法。该方法通过超分辨图像复原处理圆孔显微图像,提高了传统光学显微系统对圆孔成像的分辨率,确定了以超分辨复原图像灰度值为0.399作为圆孔物理边缘判据,实现对圆孔边缘的准确探测。理论分析表明该方法可准确测量微米级及以上直径圆孔。核孔膜孔径测量实验中,由二值化图像得到孔径测量结果为6.35μm(测量不确定度为0.08μm),与扫描电镜测量结果6.268μm(测量不确定度为0.083μm)相符,测量误差仅0.08μm。该技术有助于实现对圆孔形状的快速、准确在线测量。更多还原

【Abstract】 An optical microscopy for pore size measurement based on super-resolution image restoration is proposed to obtain an accurate measurement.The method facilitates the fast and accurate online inspection of pore structure.By super-resolution image restoration,the lateral resolution of the pore image is significantly improved,yielding a reasonable circle edge-setting criterion of 0.399,and achieving precise pore edge detection.Theoretical analysis shows that the proposed method can measure the pore with diameter of micron magnitude and higher.The nuclear track-etched membrane pore size measurement result obtained by the proposed method is 6.35(0.08)μm,which agrees well with the scanning electron microscope result of 6.268(0.083)μm,and the measurement error is 0.08μm.更多还原