Effects of Grain Size and Film Thickness on Dielectric Properties of Bi(1.5)Mg_(1.0)Nb_(1.5)O_7 Thin Films Prepared by Radio-Frequency Magnetron Sputtering
Bi1.5Mg Nb1.5O7(BMN) thin films with a cubic pyrochlore structure were prepared on Pt/Ti/Si O2/Si substrates via radio-frequency(RF) magnetron sputter deposition. The grain size and thickness of the thin films were controlled via the change of post-annealing time at 750 ℃ and the sputtering time, respectively. The effects of grain size and film thickness on the phase compositions, microstructures and dielectric properties of BMN thin films were investigated. As the average grain size and thickness of BMN th...
【基金】
江苏高校优势学科建设工程资助项目(PAPD);
长江学者和创新团队发展计划(IRT1146)资助
【更新日期】
2016-11-07
【分类号】
TB383.2
【正文快照】
YAN Zijing1,LU Yinong1,2,LIU Yunfei1,2,GAO Hong1,MA Chengjian1,JIANG Xiaowei1(1.State Key Laboratory of Materials-Oriented Chemical Engineering,College of Materials Science and Engineering,Nanjing TechUniversity,Nanjing 210009,China;2.Jiangsu National Syn
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