【摘要】 设计并制备了一种高性能有机聚合物Y型数字热光开关(DOS)。通过设计Y型DOS特殊的分支与电极结构,利用光束传播法(BPM)模拟,优化设计得到了-56dB超低的开关串扰,并具有良好的波长无关特性。将DOS的下包层改为SiO2,利用其较大的热导率可以有效降低开关时间。利用旋转涂覆、真空镀膜、接触曝光、反应离子刻蚀(RIE)、切割和抛光等传统微加工工艺,并通过改进部分工艺流程,成功制得了有机聚合物DOS。器件插入损耗为4.7dB,功耗为31.7mW,光开关串扰仅为-40.3dB,开关的上升和下降时间分别为342和318μs。在相同的功耗下,当输入光波长信号从1 510到1 600nm变化,器件的插损小于6.8dB,串扰小于-31.0dB,呈现了非常良好的波长不相关特性。实验结果表明,本文研制的DOS同时具备低插损、低串扰、高速响应和波长不相关特性。更多还原

【Abstract】 A Y-branched high-performance polymer digital thermo-optic switch was designed and fabricated.With the beam propagation method(BPM),a Y-branched digital optical switch with special structures of branches and electrodes was obtained,which has low crosstalk of-56 dB and good wavelength irrelevant features.By using SiO2 as under-cladding,the response time can be effectively reduced due to its large thermal conductivity.The polymer digital thermo-optic switch was successfully fabricated with the traditional micro-fabrication techniques,including spinning coating,vacuum evaporating,contact lithography,reactive iron etching(RIE),standard cutting and polish process,and the improvement of process flow.The fabricated digital thermo-optic switch shows insertion loss of 4.7dB and low crosstalk of-40.3dB at an applied heating power of 31.7mW.The measured rise and fall times are 342μs and318μs,respectively.At the same heating power,the switch exhibits independence on wavelength at insertion loss smaller than 6.8dB and crosstalk lower than-31.0dB between 1 510 nm and 1 600 nm.The experimental results show the device has small insertion loss,low crosstalk,high speed and good independence on wavelength.更多还原