【摘要】 水汽透过率(WVTR)是衡量有机电致发光器件(OLED)封装薄膜性能的重要参数之一。本文研究了基于钙电学法的WVTR测试方法,设计并研制了可满足OLED水汽透过率测试精度和功能要求的测试系统,测试精度达1×10-6g·m-2·d-1,量程为10 g·m-2·d-1,可同时完成20个样品的快速、精确测量。利用本系统对采用原子层沉积技术制备的不同厚度Al2O3封装薄膜的WVTR进行了测试研究,结果表明,Al2O3薄膜具有良好的水汽阻挡性能。更多还原

【Abstract】 For encapsulated thin film of the organic light emitting devices and flexible electronic devices,water vapor transmission rate（ WVTR） is one of the most important parameters to evaluate the performance of thin film. In this paper,the method of calcium electrical test was studied. Based on this method,a new type of water vapor transmission measurement system was designed and developed,which can meet the requirement of accuracy and rapidity for WVTR testing of OLED. The results show that the precision of the system is 1 × 10- 6g·m- 2·d- 1and the range is 10 g·m- 2·d- 1. The system can measure 20 samples rapidly and accurately at the same time. Deposited by atomic layer deposition,the WVTR of the different thickness Al2O3 thin films encapsulated layers（ TFE） were studied. The results show that Al₂O₃ thin film has low water vapor barrier properties.更多还原