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基于聚焦离子束技术制备金刚石/M(M=Cu,Al,AlN)双相复合材料HRTEM样品

Applications of FIB technique in the preparation of HRTEM samples for diamond/M( M = Cu,Al,Al N)composite materials

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【作者】 乔祎李建伟刘刚张洋陈良贤史为严琴舫张海龙

【Author】 QIAO Yi;LI Jian-wei;LIU Gang;ZHANG Yang;CHEN Liang-xian;SHI Wei;YAN Qin-fang;ZHANG Hai-long;State Key Laboratory for Advanced Metals and Materials,University of Science and Technology Beijing;School of Materials Science and Engineering,University of Science and Technology Beijing;Carl Zeiss AG;

【机构】 北京科技大学新金属材料国家重点实验室北京科技大学材料科学与工程学院蔡司光学仪器

【摘要】 分别以金刚石/Cu,金刚石/Al,金刚石/Al N等双相复合材料为研究对象,应用聚焦离子束(FIB)场发射扫描双束电镜,成功制备了含双相及界面结构的高分辨透射电镜(HRTEM)样品,并减小了Ga离子的非晶损伤层。HRTEM成功观测到金刚石与不同材料复合时的晶体共格/半共格/非共格关系,为进一步研究金刚石双相复合材料的界面成分和晶体结构奠定了基础。

【Abstract】 Dual-phase composite materials such as diamond / Cu,diamond / Al and diamond / Al N were investigated in this paper.High resolution transmission electron microscopy( HRTEM) samples containing the two phases and the interface were prepared by focused ion beam( FIB) technique. During the preparation,the Ga ion-induced amorphous damaged layer was successfully reduced.The crystallographic orientation relationship of coherent, semi coherent or incoherent between diamond and other material was characterized clearly through HRTEM. The results are useful for further study of chemical composition and crystal structure of the diamond-containing dual-phase interface.

【关键词】 FIB金刚石/Al金刚石/Cu金刚石/Al NHRTEM
【Key words】 FIBdiamond / Aldiamond / Cudiamond / Al NHRTEM
【基金】 国家自然科学基金资助项目(No.51401021)
  • 【文献出处】 电子显微学报 ,Journal of Chinese Electron Microscopy Society , 编辑部邮箱 ,2016年01期
  • 【分类号】TB33
  • 【被引频次】5
  • 【下载频次】269
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