【摘要】 针对LTCC基板进行CO₂激光切割实验研究。分析激光功率、激光频率、切割速度及辅助气体压力等参数对切割宽度、深度及飞溅物的影响。阐述了LTCC中金属导体对切割的阻碍作用以及CO2激光的热效应对LTCC表层导体形貌及附着力的影响。更多还原

【Abstract】 The cutting experiments for LTCC substrate are studied using CO₂ laser. The effects of laser energy, repeat frequency, cutting speed and assistant gas pressure on the cutting width, depth and splatter are analyzed. Moreover, the block effect of LTCC electronic conductor in cutting process is expatiated, and the effects of CO2 laser heating on the morphology and adhesive force of LTCC electronic conductor are discussed.更多还原