【摘要】 采用双源气溶胶辅助化学气相沉积法制备了Al掺杂Zn O薄膜。研究了不同的乙醇和甲醇溶液比例对AZO薄膜各种性能的影响。通过紫外-可见光吸收光谱、原子力显微镜、扫描电子显微镜和X射线衍射对薄膜性能进行表征。结果表明通过使用双源AACVD法可以获得具有明显(002)择优取向AZO薄膜,并且在15 m L乙醇和20 m L甲醇时具有最佳的结晶性能,同时具有最优的光电学性能。不同乙醇和甲醇比例下薄膜的形貌不同。更多还原

【Abstract】 Al-doped Zn O thin films were prepared on glass substrates with different proportions of ethanol and methanol solution by dual-source aerosol-assisted chemical vapor deposition method. The structure, morphology, optical and electrical properties were investigated by X-ray diffractometer, atomic force microscope, SEM, UV-vis double beam spectrophotometer and 4 point probe method. AZO thin films exhibited strong growth orientation along the( 002) plane by the dual-source AACVD method. When the ethanol and methanol was 15 m L and 20 m L,respectively,the AZO thin film had best crystallization and had optimal electro-opotical properties. The films exhibited different morphologies with different proportions of ethanol and methanol solution.更多还原