【摘要】 纳/微氧化锌材料性能优良,用途广泛,制备方法较多,其中化学气相沉积法(CVD)是较常用的方法之一。详细介绍了CVD方法制备纳米氧化锌的主要影响因素,概述了计算流体动力学(CFD)模拟在化学气相沉积法方面的应用和研究现状,并指出应该采用实验研究和计算模拟相结合的方法进行研究,利用计算模拟指导实验,从而实现纳微结构的可控生长。更多还原

【Abstract】 ZnO nano/microstructures have received extensive research because of their unique properties and versatile applications.Chemical vapor deposition(CVD)is one of the most common preparation methods.A comprehensive review is presented to introduce the main influencing factors of CVD during the preparation of ZnO nano/microstructures.The development and research status of computational fluid dynamics(CFD)simulation for chemical vapor deposition are summarized.The discuss inferred that experimental study and numerical simulation should be combined to achieve controllable growth of nano/microstructure.更多还原