【摘要】 采用多弧离子镀的方法在齿轮材料40Cr钢基体表面上制备TiAlN涂层,分析了工艺参数对涂层与基体结合力的影响。结果表明,随着基体负偏压的增加,膜基结合力增强,当超过某一最大值时膜基结合力会逐渐下降。随着N₂分压的增加,膜基结合力逐渐增强。更多还原

【Abstract】 The TiAlN film was prepared on 40Cr gear material by multi-arc ion plating deposition. The effects of process parameters on adhesion strength between the film and the substrate were investigated. The results show that the adhesion strength of ion plating TiAlN coating on 40 Cr steel increase with the increase of negative bias, and the adhesion strength increase with the increase of N₂ partial pressure, too.更多还原