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聚合物的放气分率与放气模型研究

Modelling and Characterization of Polymer Outgassing Behavior

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【作者】 罗艳王魁波张罗莎吴晓斌王宇

【Author】 Luo Yan;Wang Kuibo;Zhang Luosha;Wu Xiaobin;Wang Yu;Academy of Opto-Electronics,Chinese Academy of Sciences;

【机构】 中国科学院光电研究院

【摘要】 在某些工程应用中,除了关注真空材料的总放气率之外,还需知道放出的单一气体的放气分率。本文采用定容升压法对三类聚合物样品进行放气率测试和放气组分分析;将四极质谱计和真空规对比校准修正所测的放气分压,得到水和碳氢化合物的放气分率随时间变化情况;依据扩散放气模型,对所测数据进行曲线拟合,获得具有实际应用意义的放气率表达式和时间指数。

【Abstract】 We addressedthe outgassing properties of various polymers as vacuum compatible materials,including but not limited to the total outgassing rate,partial outgassing pressure of different species,and the timeevolution of the total and partial outgassing rates,in the constant-volume pressure-boosting method. The partial outgassing pressures of polyimide( PI),epoxy( EP) and tetra-fluoroethylene / propylene( FEPM) were measured with quadrupole mass-spectroscopy at every hour,calibrated and corrected with vacuum gauge,and the time evolution of the total and partial outgassing rates,such as the partial outgassing rates of water and hydrocarbons,wereevaluated. In addition,the analytical expressions of the time-dependent total and partial outgassing rates were derived by data-fitting of the measured results based on gas diffusion model. The total outgassing rates of PI,EP and FEPM were listed in a descending order. We suggest that the preliminary results be of much technological interest.

  • 【文献出处】 真空科学与技术学报 ,Chinese Journal of Vacuum Science and Technology , 编辑部邮箱 ,2015年09期
  • 【分类号】TB74
  • 【被引频次】9
  • 【下载频次】238
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