【摘要】 采用电子束蒸发镀膜工艺,在不同的基底材料上镀制了Al和Al2O3/Al薄膜,研制了国际热核聚变实验堆光学诊断中用具有较高反射率薄膜第一镜。通过中频脉冲偏压方法产生氢等离子体,对薄膜第一镜在氢等离子溅射下性能及特性进行比较分析。研究结果表明:在本实验氢离子溅射条件下,第一镜样品表面污染物的沉积速度大于溅射速度,样品表面沉积了少量的真空室内物质,通过X射线光电子能谱分析证实金属污染物均为氧化物,对光谱反射率影响较小。而由于基底和膜层结构的不同,薄膜第一镜自身结构的稳定性差异较大,其中Al/SS304和Al2O3/Al/Si O2样件表现出很好的耐等离子溅射稳定性,可以成为第一镜的备选方案。更多还原

【Abstract】 The negative impact ofthe highly reflective mirror,the 1st mirror fabricated with Al and / or Al2O3/ Al coatings grown by electron beam evaporation on different substrates and used in international thermonuclear experimental reactor( ITER) for optical diagnosis,was investigated with the hydrogen plasma generated by mid-frequency pulsed voltage. The microstructures and contents of the plasmaetched surfaces were characterized with X-ray diffraction,X-ray photoelectron spectroscopy,scanning electron microscopy and atomic force microscopy. The results show that thin layers of transparent metals oxides,mainly from the chamber walls and little affecting the mirror’s reflectivity,were synthesized on the surface,possibly because their deposition rateswere faster than the plasma etching rate. In addition,when it comes to thermal stability and cost,Al coatings on stainless steel( SS304) and / or Al / SiO2 films coated with Al2O3 outperforms the single crystalline metal coatings as the 1st mirror’s material.更多还原