【摘要】 采用脉冲偏压电弧离子镀沉积系统,在W6Mo5Cr4V2高速钢基体上制备出不同成分的TiCx薄膜。通过扫描电镜、X射线衍射、X射线光电子谱及拉曼光谱对薄膜的表面形貌和微观结构进行分析;采用纳米压痕和摩擦磨损试验来表征薄膜的力学性能。结果表明:所制备的薄膜为富碳TiCx薄膜,富碳成分均以非晶碳形式存在。随着非晶碳组分的增加,薄膜硬度和弹性模量逐渐降低,获得的最高值分别为36GPa和381GPa,同时薄膜的摩擦系数在0.2~0.3之间。更多还原

【Abstract】 The TiCxcoatings were synthesized by pulsed arc ion plating on substrate of W6Mo5Cr4V2 high speed steel.The impact of the growth conditions,including but not limited to the deposition rate,bias voltage and Ti-transition layer,on the phase structures and mechanical properties of the coating were characterized with X-ray diffraction,X-ray photoelectron spectroscopy,scanning electron microscopy,Raman spectroscopy and conventional mechanical probes.The results show that the excess carbon existing in in amorphous phasehas a major impact on the mechanical properties of the as-deposited TiCxcoatings,and that the Ti-transition layer considerably enhanced the interfacial adhsion.To be specific,as amorphous carbon fraction increased from 50.3%to 61.9%(at.),the hardness decreased from 36 to 25GPa,the elastic modulus decreased from 381 to 289GPa.The friction coefficient were estimated to be 0.2~0.3.更多还原