【摘要】 通过磁控溅射的方法在石英衬底上沉积了Au薄膜,经过热退火处理形成了不同表面形貌和尺寸的Au纳米颗粒。通过XRD、AFM和紫外可见光谱研究了薄膜的质量、表面形貌、尺寸和光谱特性,分析了不同表面形貌和尺寸的Au纳米颗粒对局域表面等离激元共振的影响。研究表明:随着退火温度的升高,Au薄膜由各向异性的蠕虫状结构逐渐变成规则的纳米颗粒,退火温度越高,Au纳米颗粒越接近于圆形,颗粒间距越大,导致局域表面等离激元共振峰位发生蓝移,半峰宽变窄;另外溅射时间对Au纳米颗粒的影响也很大,随着溅射时间的增加,颗粒尺寸变大,变得不再均匀,局域表面等离激元共振峰发生红移、宽化和向长波段上扬。更多还原

【Abstract】 Au films were deposited on the quartz substrate by magnetron sputtering,and Au nanoparticles with different surface morphologies and sizes formed through thermal annealing treatment.The quality,surface morphology,size and optical properties of the nanoparticles were studied by X-ray diffraction,Atomic Force Microscope and Ultraviolet-Visible spectroscopy.The effects of morphologies and sizes on the localized surface plasmon resonance were studied.The results show that,with the increase in the thermal annealing temperature,Au films gradually change to regular nanoparticles from anisotropic wormlike structure;when the annealing temperature is higher,Au nanoparticles are closer to roundness;larger particle space results in blue shift of localized surface plasmon resonance peak position and narrow half-peak breadth.In addition,sputtering time also imposes great impacts on Au nanoparticles.As sputtering time rises,particle size increases and becomes on longer even.Red shift,broadening and lifting to long-wave band happen to localized surface plasmon resonance peak position.更多还原