【摘要】 采用磁过滤阴极真空弧(FCVA)技术制备了质量厚度为5~7μg/cm2的类金刚石碳(DLC)剥离膜。用XP2U型精密电子天平测试分析了100mm范围内的DLC剥离膜均匀性,结果显示其最大不均匀性小于10%。通过扫描电子显微镜(SEM)、原子力显微镜(AFM)、万能摩擦磨损试验机和X光电子谱(XPS)测试分析了DLC剥离膜的表面形貌、耐磨损特性和结构,结果显示采用双90°FCVA技术沉积的DLC剥离膜表面光滑致密、耐磨,几乎没有大颗粒的污染,表征金刚石特性的sp3键含量超过70%。在北京HI-13串列加速器上使用107 Ag-、70 Ge-、48 Ti-、28Si-、197 Au-和127I-六种典型质量的离子束对质量厚度为5~7μg/cm2的DLC剥离膜和碳剥离膜寿命进行测试比较,结果显示DLC剥离膜寿命比碳剥离膜的高2.6~10倍。更多还原

【Abstract】 The diamond-like carbon(DLC)stripper foils with 5-7μg/cm2 in thickness were produced by using the filtered cathodic vacuum arc(FCVA)technology.The uniformity of the DLC stripper foils was measured by the XP2 U balance.The results show that the maximum inhomongeneity of the DLC stripper foils in the range of100mm is less than 10%.The structures and properties of the DLC stripper foils were also evaluated and analyzed by scanning electron microscopy(SEM),atom force microscopy(AFM),tribometer and X-ray photoelectron spectroscopy(XPS).The SEM,AFM images and wear test results show that the DLC stripper foils are smooth and tense,and contain hardly droplets through the double 90°filters.The X-ray photoelectron spectrum indicates the sp3 bonds of the DLC stripper foils exceed 70%.Irradiation lifetimes and the DLC stripper foils with 5-7μg/cm2 were tested and compared with the107 Ag-,70 Ge-,48 Ti-,28Si-,197 Au-and 127I-ion beams at the Beijing HI-13 TandemAccelerator.The results indicate that the lifetime of DLC stripper foil is 2.6-10 times than that of the carbon stripper foil.更多还原