【摘要】 用脉冲激光沉积法制备类金刚石膜的实验中,保持其它实验参数不变,沉积时间分别取15、20min和25min来沉积类金刚石膜。用Raman光谱仪对薄膜的微观结构进行检测;用原子力显微镜对薄膜的表面形貌进行检测。检测结果表明,在其它实验参数不变的条件下,沉积时间从15min增加到20min时,薄膜中石墨晶粒数量或体积减小,sp3/sp2比值和薄膜密度明显增大,薄膜表面粗糙度显著降低。沉积时间从20min增加到25min时,薄膜中石墨晶粒数量或体积减小,但是sp3/sp2比值和薄膜密度都没有明显改变。更多还原

【Abstract】 When the Diamond-like carbon(DLC)films were deposited by the pulsed laser deposition,the deposition time took15、20min and 25 min respectively and other experimental conditions were kept unchangeable.The microstructure of the film was detected by the visible Raman spectroscopy.The topography of the film was detected by the atomic force microscopy(AFM).The experimental result demonstrates when the deposition time increases from 15 min to 20 min,the size or number of graphitic crystallites in film would decrease,ratio of sp3/sp2 and density in film would increase obviously,the roughness of film would reduce obviously.When the deposition time increases from 20 min to 25 min,the size or number of graphitic crystallites in film would decrease,but change of ratio of sp3/sp2 and density would not be obvious.更多还原