【摘要】 该文设计了一种基于声表面波(SAW)传感原理的无源无线压力传感器。阐述了SAW单端谐振器的原理,对SAW压力传感器的原理进行了分析。选择了基于类似两端固定梁的敏感结构并利用ANSYS软件对其敏感结构进行仿真、分析。利用Mathcad软件对SAW压力传感器进行建模、仿真。并根据仿真结果设计和制作了SAW压力传感器。测试结果表明,制作的传感器灵敏度较高,误差小,具备良好的压力频率特性。更多还原

【Abstract】 A passive and wireless pressure sensor based on SAW has been designed in this work.Firstly,the principle of SAW one-port resonator was presented.Secondly,the principle of SAW pressure sensor was analyzed.The sensitive structure based on similar both ends fixed beam has been chosen and the simulation and analysis of the sensitive structure have been carried out by ANSYS software.SAW pressure sensor has been modeled and simulated by using Mathcad software.The tested results show that the fabricated sensor has the features of high sensitivity,very small errors and good pressure frequency.更多还原