【摘要】 针对高量程压阻式加速度传感器在高温环境下的失效问题,分析了高温对高量程加速度计的影响,得出的失效模式为:高温导致固支梁的翘曲或变形;温度变化引起压敏电阻的变化进而导致传感器输出漂移甚至输出失效;测量电路板在高温下变得扭曲或者导电层的分离。然后,利用ANSYS对固支梁和电路板进行仿真,得出各模块在200℃的温度冲击下结构的动态响应,并通过高温步进应力试验进行验证,得出传感器的工作极限为150℃,破坏极限为160℃。更多还原

【Abstract】 For the failure problem of high range piezoresistive accelerometer under the environment of high temperature,the influence of high temperature on high range accelerometer was analyzed. It was concluded that the failure mode was that high temperature caused the clamped beam warping or deformation,the temperature variation caused the change of the pressure sensitive resistance and failure output,and measurement circuit board became distorted or separated of the conductive layer at high temperatures.Then,clamped beam and circuit boards were simulated by ANSYS,and the dynamic response of the structure of the modules in the temperature of 200 ℃ under impact were got through high temperature step stress test,work limit of the sensor is 150 ℃ and destroy limit is 160 ℃.更多还原