【摘要】 肖特基势垒二极管(SBD)具有强非线性效应、速度快及容易系统集成等特点,常用于微波、毫米波及太赫兹波的产生和检测。本文通过电子束光刻等技术制作出肖特基接触直径1μm的二极管,并对二极管进行了直流测试和射频测试。经过直流测试,二极管的串联电阻为10.2?,零偏结电容为1.76 f F,肖特基结截止频率达到了8.7 THz;相同管子的射频测试串联电阻为15.4?,零偏结电容1.46 f F,肖特基结截止频率也达到了7 THz。更多还原

【Abstract】 A planar Schottky Barrier Diode(SBD) with the Schottky contact diameter of 1 μm fabricated using electron beam lithography method is reported. The DC measurement results show that the DC series resistance, the junction capacitance and the cut-off frequency of SBD are 10.2 ?, 1.76 f F and 8.7 THz, respectively; the RF extracted series resistance of 15.4 ?, the junction capacitance of 1.46 f F and the cut-off frequency of 7 THz are also demonstrated.更多还原