【摘要】 采用化学水浴法制备了结构为CdS/CdS的薄膜,并结合电子束真空蒸发法,在两层CdS之间沉积一层Dy单质制备了结构为CdS/Dy/CdS的Dy掺杂薄膜。XRD和SEM测试表明,未掺杂的薄膜为沿(111)晶面择优生长的立方相闪锌矿结构,但是含有Dy掺杂层的CdS薄膜则为立方相和六方相的混合结构,并且掺Dy后CdS的晶粒尺寸和晶格常数变大。XPS分析表明,两种样品均富Cd,掺Dy有助于降低薄膜中O和C的含量,进而抑制薄膜中氧化物的形成;未掺杂时薄膜表面和内部Cd、S的原子比分别为1∶0.63和1∶0.71,掺Dy后分别提高到1∶0.81和1∶0.83,更接近CdS的化学计量比,而且组分更加均匀。更多还原

【Abstract】 Pure CdS thin film with the structure of CdS / CdS was prepared by means of chemical bath deposition.Rare earth Dy doped film with the structure of CdS / Dy / CdS was also prepared by connecting with the electron beam evaporation method.XRD andSEM tests show that the crystallographic structure of un-doped film is found to be cubic with a preferential orientation along the(111) plane.But CdS film is a mixed structure of cubic and hexagonal phase after the deposition of Dy layer,and Dy-doping increases the grain size and lattice constant of CdS.XPS analysis indicates that the two samples are all rich in Cd.Doping with Dy helps to reduce the concentration of O and C in the films,and then inhibits the formation of oxide.The inside and surface proportion of Cd,S atoms in un-doped film are 1 0.63 and 1 0.71,respectively.While they are10.81 and 10.83 in CdS / Dy / CdS sample,respectively.So the deposition of Dy layer between the two CdS layers promotes the combination of Cd andS,and leads to a uniform chemical composition.更多还原