【摘要】 应用自行研制的软X射线反射率计,分别对不同的反射镜样品,在不同的工作波段以及掠射角下研究了软X射线波段掠入射光学表面的散射.实验结果表明:掠射角增加,波长减小,粗糙度增加,软X射线掠入射表面散射程度加重.更多还原

【Abstract】 The soft X-ray scattering distributions of several mirrors were measured by a self-made soft X-ray reflectometer for different wavelengths and grazing angles.The experimental results indicated that the soft X-ray surface scattering increased with increasing grazing angle and surface roughness,but decreased with increasing wavelength.更多还原