An Array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled Waveguide Photodetectors Each with a Bandwidth of 20 GHz

【摘要】 We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors(ECPDs).The 10 ECPDs exhibit a uniform 3dB bandwidth of 20 GHz and low dark current of about 1 nA at 2 V reverse bias.The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23 A/W with an active region of 5×25 μm~2.The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices.更多还原

【Abstract】 We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors(ECPDs).The 10 ECPDs exhibit a uniform 3dB bandwidth of 20 GHz and low dark current of about 1 nA at 2 V reverse bias.The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23 A/W with an active region of 5×25 μm~2.The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices.更多还原