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Thermal Analysis of Implant-Defined Vertical Cavity Surface Emitting Laser Array

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【Author】 XUN Meng;XU Chen;XIE Yi-Yang;DENG Jun;XU Kun;CHEN Hong-Da;Key Laboratory of Optoelectronics Technology(Ministry of Education),Beijing University of Technology;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductor,Chinese Academy of Sciences;

【机构】 Key Laboratory of Optoelectronics Technology(Ministry of Education),Beijing University of Technology； State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductor,Chinese Academy of Sciences；

【摘要】 A three-dimensional electrical-thermal coupling model based on the finite element method is applied to study thermal properties of implant-defined vertical cavity surface emitting laser(VCSEL) arrays.Several parameters including inter-element spacing,scales,injected current density and substrate temperature are considered.The actual temperatures obtained through experiment are in excellent agreement with the calculated results,which proves the accuracy of the model.Due to the serious thermal problem,it is essential to design arrays of low self-heating.The analysis can provide a foundation for designing VCSEL arrays in the future.更多还原

【Abstract】 A three-dimensional electrical-thermal coupling model based on the finite element method is applied to study thermal properties of implant-defined vertical cavity surface emitting laser(VCSEL) arrays.Several parameters including inter-element spacing,scales,injected current density and substrate temperature are considered.The actual temperatures obtained through experiment are in excellent agreement with the calculated results,which proves the accuracy of the model.Due to the serious thermal problem,it is essential to design arrays of low self-heating.The analysis can provide a foundation for designing VCSEL arrays in the future.更多还原

【基金】 Supported by the National Natural Science Foundation of China under Grant Nos 61376049,61076044,61107026,61204011and U1037602;the Natural Science Foundation of Beijing under Grant Nos 4132006,4102003,and 4112006;the Scientific Research Fund Project of Municipal Education Commission of Beijing under Grant No KM201210005004;the Specialized Research Fund for the Doctoral Program of Higher Education under Grant No 20121103110018

【文献出处】 Chinese Physics Letters ,中国物理快报(英文版) , 编辑部邮箱 ,2015年01期

【分类号】TN248
【下载频次】21

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