Zirconium silicate(ZrSiO4) film was prepared on n-type silicon substrate via nonhydrolytic sol-gel method. The phase composition and the microstructure of samples were studied. Meanwhile, the influences of heat treatment temperature, precursor concentration and coating times on the microstructure and the morphology of ZrSiO4 film were investigated by means of XRD and FE-SEM. The results indicated that ZrSiO4 powder was synthesized at 750 ℃ by introducing mineralizer Li F. However, the dense and smooth ZrSiO...