【摘要】 对纯铁软磁材料(工业纯铁)、Nd2Fe14B单晶体和多晶Nd Fe B硬磁性材料,使用Axis UltraDLDX射线光电子能谱仪分别在静电模式和磁透镜模式下采集了全谱和高分辨率元素XPS谱图。通过对比3种材料分别在两种模式下的谱峰形状、谱峰位置、背底高低以及峰相对面积比值,探讨了样品在磁透镜磁场中被磁化后以及样品自身的磁场大小对XPS的定性和定量表征的影响。结果表明:纯铁材料可以在磁透镜模式下被正确地定性和定量表征;对于Nd2Fe14单晶体,磁透镜模式可以用于定性表征而不适合定量表征;对于多晶Fe Nd B,磁透镜模式下表征结果跟样品产生的磁场方向有关,光电子信号弱,有时甚至检测不出光电子信号。更多还原

【Abstract】 In our experiment,three magnetic materials,which are easily magnetized material( pure iron),soft magnetic materials( monocrystalline Nd2Fe14B) and hard magnetic materials( polycrystalline Nd Fe B),were selected as model samples to investigate the influence of magnetic properties on XPS characterization reliability in hybrid mode. Survey spectra and high-resolution spectra in both electrostatic and magnetic lens mode for three samples were collected using Axis Ultra DLD. By comparing peak shape and position of elements,spectrum background level and peak area ratio in the two modes,the influence of the magnetic intensity of the samples,which was due to the magnetization by magnetic lens for soft magnetic sample,on the XPS qualitative and quantitative characterization were evaluated. The results showed that:( 1) The pure iron can be correctly characterized in both qualitative and quantitative characterization;( 2)For the monocrystalline Nd2Fe14 B,magnetic lens model can be used for the qualitative characterization but not suitable for quantitative characterization;( 3) For polycrystalline Fe Nd B,the results in magnetic lens mode are relative to the magnetic field direction of sample,the photoelectron signal is weak,even no signal can be detected sometimes.更多还原