【摘要】 利用角分辩的光散射实验测量方法来提取各向同性随机表面的粗糙指数.在实验中用CCD探测器采集入射角是45°时的散射图像,并沿着获得的和入射角与散射角有关的等垂直波矢散射方位曲线,测量样品表面在散射角从10°到80°之间不同值时的15条光强散射轮廓.对每一条光强散射轮廓进行高斯函数拟合得到散射轮廓的半宽度,然后根据自仿射分形表面模型,通过散射轮廓的半宽度与垂直波失分量的变化关系得到样品表面的粗糙指数α.与原子力显微镜测量得到的粗糙指数相比较,两者符合的很好.更多还原

【Abstract】 The experimental method of angle- resolved light scattering is used to extract the isotropic random rough surface roughness exponent.The scattered intensity pattern is measured at a certain angle of incidence with the CCD.We obtain the constant perpendicular wave vectors scattering range curve about the incident angle with the scattering polar angle.Along this specified curve,we-can extract the diffused intensity profiles when the scattering polar angles vary from 10° to 80°.Then we can obtain the half- width by fitting a symmetrically descending function,usually the Gaussian function.According to the self- affine fractal surface model,we use the relationship between the half- width of the diffused intensity profiles and the perpendicular component of wave vector to obtain the roughness exponent of the rough surface samples a.The roughness extracted by this method well agrees with measurements obtained by use of an atomic force microscope.更多还原