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自组装静电驱动微机电系统倾斜镜（英文）

An electrostatically actuated MEMS tilting mirror based on self-assembly

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【Author】 Wang Qiang;Wang Weimin;Qiu Chuankai;Yu Junsheng;State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering,Institute of Optics and Electronics,Chinese Academy of Sciences;School of Optoelectronic Information,University of Electronic Science and Technology of China;

【机构】中国科学院光电技术研究所微细加工光学技术国家重点实验室；电子科技大学光电信息学院；

【摘要】研制了一种基于自组装技术的静电驱动微机电系统(MEMS)倾斜镜,并利用表面硅工艺PolyMUMPs制备了样品。倾斜镜主要由一个中心镜面,两个偏转梁和两个可实现自组装的复合悬臂梁组成。中心镜面离衬底的高度可通过增大金和多晶硅复合悬臂梁的残余应力梯度得到提升。热退火技术被用于提高金层的残余应力。器件结构利用有限元仿真软件进行了优化并通过实验进行了验证。经过200℃热退火后,倾斜镜的偏转角度可以达到3.6°。该倾斜镜可运用于微光机电系统。更多还原

【Abstract】 An electrostatically actuated microelectromechanical systems(MEMS)tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process(PolyMUMPs).The tilting mirror is composed of one central mirror,two torsional springs and two bimorph suspension beams for self-assembly.The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams.Thermal anneal technique is employed to increase the residual stress in Au film.The structure is optimized by Finite Element Analysis(FEA)and experimentally verified.The torsion angle of the tilting mirror gets to 3.6°with 200°C thermal anneal.The tilting mirror has potential to be implemented for mirco-optoelectro-mechanical systems(MOEMS).更多还原

【关键词】倾斜镜；微机电系统；静电驱动；自组装；
【Key words】 tilting mirror； MEMS； electrostatic actuation； self-assembly；

【基金】 supported by National Natural Science Foundation of China(60978051);National Natural Science Associate Foundation of China(11176033)

【文献出处】强激光与粒子束 ,High Power Laser and Particle Beams , 编辑部邮箱 ,2015年02期

【分类号】TH-39
【被引频次】1
【下载频次】57

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