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镍铬合金靶材裂纹产生原因分析
Analysis of the Causes of Cracks on Vacuum Smelting Ni-Cr Alloy Target Materials
【摘要】 研究全返回料真空冶炼镍铬合金靶材产品内部产生裂纹的原因.通过金相显微镜、电子扫描显微镜等仪器进行观察检测,认为夹杂物是产生裂纹的主要因素,并通过加强对入炉料的清理和改进冶炼工艺等措施,减少和避免废品出现,改善材料质量,提高产品成材率,增强产品市场竞争力.
【Abstract】 Study of the causes of cracks on full recycled vacuum smelting Ni-Cr alloy is made. It is considered that the inclusion is the main factor caused the cracks by the observation of metallographic microscope,scanning electron microscope,etc. And by strengthening the cleaning of the raw materials and the improvement of smelting process and other measures,products rejected have been reduced or avoided,which improves the material quality and the yield rate of finished products,and enhances the market competitiveness of products.
【关键词】 薄膜电阻;
镍铬合金;
溅射靶材;
夹杂物;
裂纹;
【Key words】 thin film resistor; Ni-Cr alloy; sputtering target materials; inclusion; crackle;
【Key words】 thin film resistor; Ni-Cr alloy; sputtering target materials; inclusion; crackle;
- 【文献出处】 南方金属 ,Southern Metals , 编辑部邮箱 ,2015年04期
- 【分类号】TG115
- 【下载频次】153