【摘要】 为了获得高面形精度、高反射率的轻质反射镜,选用Si C为基底材料,对反射镜的加工制备工艺进行了深入研究。首先从车载大口径FSM中平面反射镜的应用需求出发,提出了反射镜的主要设计指标。然后,针对反射镜的轻量化结构采用反应烧结法获得镜坯,并通过机械加工使其接近成型;继而采用物理气相沉积法对Si C反射镜进行表面改性处理,进而采用古典抛光法对反射镜进行光学精加工;最后在反射镜的工作表面镀覆金反射膜。在完成车载大口径FSM用Si C反射镜的加工制备后,对反射镜的面形精度和反射率进行了实验检测。结果显示:Si C反射镜的面形精度(RMS值)优于λ/30;对中波激光的反射率约为98.0%,对长波激光的反射率约为98.2%;均满足车载大口径FSM的应用需求。更多还原

【Abstract】 To obtain lightweight reflector with high surface accuracy and high reflectivity,Si C was chosen to manufacture reflector,and its preparation process was researched in detail. Firstly,the main design indexes of reflector were proposed on the basis of application requirement for vehicl E-mounted large-diameter fast steering mirror. Then reflector flan was sintered according to lightweight structure of reflector and it was processed to mould by machining. Subsequently the Si C reflector was polishing processed by conventional polishing method after surface modification by physical vapor deposition. Finally,gold reflecting film was coated on the working surface of reflector. After preparation of Si C reflector,its surface accuracy and reflectivity were tested respectively,and the measurement results show that surface accuracy( root-mean-square value) of reflector is less than λ /30,and its reflectivity for medium wavelength laser is about 98%; its reflectivity for long wavelength laser is about 98. 2%,which can satisfy application requirements of vehicl E-mounted large-diameter fast steering mirror.更多还原