【摘要】 激光沉积的类金刚石膜是红外窗口增透保护膜的极佳选择。采用波长248 nm的纳秒脉冲激光沉积硅基底类金刚石膜,研究了不同脉冲能量对膜层光学性能、机械硬度及内应力等工程应用参数的影响。实验发现,随着准分子激光脉冲能量的提高,类金刚石膜样品的红外透射率和表面硬度逐步提高,表明高能量有利于沉积光学级类金刚石保护膜;但同时,膜层的内应力也随着激光脉冲能量的提高而增大,不利于膜层在基底上的附着,需要采用其他技术和工艺消除内应力过大的问题。分析结果为纳秒脉冲激光沉积类金刚石膜的研究提供了实践基础。更多还原

【Abstract】 Diamond-like carbon(DLC) film prepared by pulsed laser deposition is one of excellent means for antireflective and protective films of infrared(IR) window. DLC film on silicon is prepared by 248 nm nanosecond laser,and influence of pulse energy on optics performance, mechanical hardness and residual stress of DLC film are studied.According as experiments, IR transmission and surface hardness of the films both increase along with increasing of laser pulse energy, which indicates that high energy is propitious to prepare protective DLC film for IR window.However, residual stress in DLC film is also increased to reduce the adhesion strength of the film on substrate. This result supplies the practice base to the study on DLC film prepared by nanosecond pulse laser deposition.更多还原