【摘要】 复杂三维微纳结构在微纳机电系统、生物医疗、组织工程、新材料、新能源、高清显示、微流控器件、微纳光学器件、微纳传感器、微纳电子、生物芯片、光电子和印刷电子等领域有着巨大的产业需求,然而现有的各种微纳制造技术无论从技术层面还是在生产率、成本、材料等方面还难以满足高效、低成本批量化制造复杂三维微纳结构的工业级应用的需求.高效、低成本批量化制造复杂三维微纳结构(尤其是大面积复杂三维微纳结构)一直被认为是一项国际化难题,也是当前国际上学术界和产业界的研究热点,以及亟待突破的瓶颈问题.微纳尺度3D打印(微纳结构增材制造)在复杂三维微纳结构、高深宽比微纳结构以及复合材料三维微纳结构制造方面具有突出的潜能和优势,而且还具有设备简单、成本低、可使用材料种类多、无需掩模或模具、直接成形的优点.微纳尺度3D打印被美国麻省理工学院(MIT)的《技术评论》列为2014年十大具有颠覆性的新兴技术.本文论述了近年国际上微纳尺度3D打印重要的研究进展和代表性研究成果,微纳尺度3D打印典型重大应用,阐述了微纳尺度3D打印当前面临的挑战性问题,并探讨了微纳尺度3D打印未来的应用前景和发展方向及趋势.为深入开展微纳尺度3D打印、增材制造和微纳制造的科学研究和工程化应用提供一定的借鉴和参考作用.更多还原

【Abstract】 There are great demands for complicated three-dimensional(3D) micro/nanostructures in various areas and micro-components, such as MEMS, bio-medical engineering, tissue engineering, new materials, new energy, HD display, micro fluidics, micro- and nano-optical devices and systems, micro/nano sensors, micro/nano electronics, optoelectronic device, printed electronics, etc. However, existing micro/nano manufacturing technologies cannot well meet these requirements of cost-effective mass producing 3D micro/nanostructures. High volume manufacturing complex 3D micro/nanostructures with low cost and high throughput, particularly for producing 3D micro/nanostructures with high aspect ratios and multi-materials as well as from wide range of materials, currently has been considered as the most significant challenging issues. Micro-and nanoscale 3D printing(micro/nanostructure additive manufacturing) has showed high potentials and unique strengths in creating arbitrary 3D micro/nanostructures, true micro/nanostructures with high aspect ratios, and advanced materials with micro/nanostructures as well as composite materials. It can also be considered to enhance capability of micro/nanofabrication technology in true 3D microcomponents manufacturing area. This paper provides a comprehensive review on significant results, recent progress for a large variety of 3D micro-and nano scale 3D printing processes, and performs the comparison of each process. Furthermore, typical applications and various 3D printing materials available are presented. Finally, the prospects, challenges and future trends are discussed. The paper may provide a reference and direction for the further explorations and studies of micro/nanostructure additive manufacturing both in industry and academia.更多还原