【摘要】 针对无阀微泵背压能力较弱等问题,采用MEMS技术制作出不同结构参数的双腔和单腔微泵体,构建了基于电机驱动的磁力式双腔串联无阀微泵测控系统。实验结果表明,泵腔面积相等的情况下,圆形泵腔的微泵流量大于椭圆形泵腔的流量;随着驱动频率的升高,双腔串联微泵的流量呈现高斯分布,并在20 Hz附近处出现流量峰值,微泵的最大流量可达1.5 mL/min,微泵的截止背压为170mmH₂O,双腔串联微泵比单腔微泵的流量增大约80%。更多还原

【Abstract】 To solve the problem of weak backpressure of valveless micro-pump,the dual and single chamber micro pumps of different structure parameters are fabricated by MEMS.The measurement and control system of magnetic driving series dual chamber micro-pump is built up by DC motor and NdFeB permanent magnets.Experiment shows that the pump flow of the circular micro pump is greater than the elliptical micro pump as the condition of equal pump chamber areas.The flow of micro-pump takes on a Gaussian distribution versus the rise of drive frequency,and a peak flow rate of 1.5 mL/min,the biggest backpressure of 170 mmH₂O are obtained when the drive frequency is about 20 Hz.Compared with single-chamber micro-pump,the flow rate of series dual-chamber micro-pump rises about 80%.更多还原