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利用飞秒激光和纳秒激光脉冲加工金刚石(英文)

Processing of diamond applying femtosecond and nanosecond laser pulses

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【作者】 董志伟张伟斌郑立威姜涛范国祥赵煦赵清亮陈德应夏元钦

【Author】 Dong Zhiwei;Zhang Weibin;Zheng Liwei;Jiang Tao;Fan Guoxiang;Zhao Xu;Zhao Qingliang;Chen Deying;Xia Yuanqin;National Key Laboratory of Science and Technology on Tunable Laser,Harbin Institute of Technology;Beijing Xinghang Mechanical-electrical Equipment CO. LTD.;School of Software,Harbin Institute of Technology;Center for Precision Engineering,Harbin Institute of Technology;

【机构】 哈尔滨工业大学可调谐激光国家级重点实验室北京星航机电装备有限公司哈尔滨工业大学软件学院哈尔滨工业大学精密机械中心

【摘要】 分别利用脉宽在40 fs和5 ns的飞秒及纳秒激光脉冲加工了钎焊在不锈钢底板上的金刚石阵列。通过测量加工区域面积和入射激光功率的关系推断出了飞秒和纳秒激光脉冲加工金刚石材料的阈值。实验结果表明,相比于纳秒激光加工,利用飞秒激光加工金刚石的阈值更低。也利用显微镜比较了利用不同种类光源加工金刚石后加工区域的形貌。研究结果证明了利用飞秒激光加工金刚石相比于纳秒激光更为有效。

【Abstract】 Diamond array was braze welded on the stainless steel substrate which was processed applying femtosecond and nanosecond laser pulses with pulse duration 40 fs and 5 ns, respectively. The threshold of diamond processed using femtosecond and nanosecond laser pulses was deduced by measuring the relationship between fabricated area and laser power. The processing results show that the threshold of diamond processed by femtosecond laser pulses is lower compared with that processed by nanosecond laser pulses. The morphology of the processed region using differentkinds of laser sources was also compared with microscope. The processing of diamond applying femtosecond was confirmed more effective than that using nanosecond pulses.

【关键词】 金刚石飞秒纳秒
【Key words】 diamondfemtosecondnanosecond
【基金】 国家自然科学基金(11004042);国家重大科学仪器设备开发专项(2012YQ040164);中央高校基本科研业务费专项资金(HIT.NSRIF.2015043);可调谐激光国家级重点实验室及航天科技支撑基金
  • 【文献出处】 红外与激光工程 ,Infrared and Laser Engineering , 编辑部邮箱 ,2015年03期
  • 【分类号】TN249
  • 【被引频次】21
  • 【下载频次】620
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