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高精度气浮支承转动平台结构设计及精度测试

Structure design and accuracy test of high precision rotation stage with air bearing support

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【作者】 肖松文孙远韩庆夫周爱玉朱涛

【Author】 XIAO Songwen;SUN Yuan;HAN Qingfu;ZHOU Aiyu;ZHU Tao;China Spallation Neutron Source, Institute of High Energy Physics, Chinese Academy of Sciences;Dongguan Institute of Neutron Science;Beijing Synchrotron Radiation Facility;Institute of Physics, Chinese Academy of Sciences;

【机构】 中国科学院高能物理研究所东莞分部东莞中子科学中心北京同步辐射实验室中国科学院物理研究所

【摘要】 针对中国散裂中子源(Chinese Spallation Neutron Source,CSNS)多功能反射谱仪反射臂对重负载、大行程及高精度的运动要求,采用气浮支承加摩擦轮驱动的组合结构。先通过气浮支承实现反射臂与地面之间无接触无摩擦,再通过摩擦轮驱动实现反射臂绕着样品台中心进行精确定位运动。为验证该方案的可行性进行气浮支承转动平台样机的研制,并通过对气浮支承转动平台的精度测试得知在全行程范围内其单向重复定位精度为0.000 31°,单向定位精度为0.000 9°。试验结果表明气浮支承加摩擦轮驱动的结构能够满足多功能反射谱仪反射臂的运动要求。

【Abstract】 Background: Multi-purpose Reflectometer(MR) is one of the three spectrometers under construction at China Spallation Neutron Source(CSNS). The reflection arm is a key component in MR, which is used to carry the neutron detector. The size of the reflection arm is 1 750 mm×1 000 mm×800 mm(L×W×H), and the weight is 1 200 kg. The reflection arm should rotate around the sample center with a rotation range of 130°, and the accuracy of the rotation should be higher than 0.001°. Purpose: This study aims to design the structure with the combination of air bearing support and friction wheel drive for the movement request of heavy load, large travel and high precision in the reflection arm. Methods: A high precision rotation stage with air bearing support is developed to verify the feasibility of this structure in which no contact and friction between reflection arm and granite floor when the air bearing works. The air floating stage is supported by three sets of air bearings, which is placed on a granite platform with the size of 1 000 mm×2 000 mm, a sample stage base is located on one side of the granite platform, a sheet steel is used to connect the air floating stage and the cross roller bearing which is installed in the sample stage base, a friction wheel is installed in the side of the air floating stage. The rotation range of the air floating stage is 45°, and the load of the air floating stage under test is 800 kg. Results: The accuracy test indicates that the rotation stage with air bearing support can offer the repeatability positioning accuracy of 0.000 31°, and the positioning accuracy of 0.000 9° within the scope of whole rotation range. Conclusion: These results show that the structure with the combination of air bearing support and friction wheel drive can satisfy the movement requirement of the reflection arm in MR.

【基金】 中国散裂中子源(CSNS)工程项目经费资助
  • 【分类号】TH703
  • 【被引频次】6
  • 【下载频次】163
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