【摘要】 在室温条件下采用磁控溅射技术在涤纶机织物表面沉积金属薄膜,利用原子力显微镜(AFM)分析溅射时间、溅射功率和气体压强等工艺参数对纳米金属薄膜表面形貌和表面粗糙度的影响,研究了溅射工艺参数与样品紫外线防护性能之间的关系。结果表明:同等工艺参数条件下,镀Ag膜试样的表面粗糙度要比镀Cu试样小很多,表面相对较为平整。溅射时间对镀Cu膜试样的表面粗糙度和紫外线防护性能影响最大,而溅射功率对镀Ag膜试样的表面粗糙度和紫外线防护性能影响最大,并分别给出了溅射Cu膜和Ag膜的最佳工艺参数。更多还原

【Abstract】 Nanoscale metal thin films were deposited on the surface of polyester weave fabric by magnetron sputtering process at room temperature.The influence of sputtering process parameters,such as sputtering time,sputtering power,and gas pressure,on the surface morphology and surface roughness of film was analyzed by atomic force microscope(AFM).The relation between sputtering parameters and the anti-ultraviolet property of film was also investigated.Results of experiments showed that the surface roughness of sample coated with silver thin films was smaller than that of the sample coated with copper thin films.The surface of the silver thin films was relatively smooth.The sputtering time had great influence on the surface roughness and anti-ultraviolet property of copper thin films,and sputtering power had great influence on the surface roughness and anti-ultraviolet property of silver thin films.The optimum process parameters of sputtering copper thin films and silver thin films were obtained.更多还原