In order to get lower uncertainty,a method was proposed to compensate the gravity deformation caused by flipping in vertical absolute three-flat test.The gravity deformation of the flat surface was simulated by finite-element software and added to the three-flat test calculation.The calibrated results were compared with shift-rotation absolute testing method,and the root mean square of the surface map difference was less than 1nm without power term.For power term verification,a flat supported on different r...
【基金】
National Science and Technology Major Project of China(No.2009ZX02205)
【更新日期】
2015-12-22
【分类号】
O439
【正文快照】
Foundation item:National Science and Technology Major Project of China(No.2009ZX02205)0 IntroductionAbsolute calibration of the reference surface is akey procedure to achieve high precise results usingFizeau interferometer.Absolute three-flat test is thep
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