【摘要】 从传统光学冷加工的原理出发,分析了传统接触式加工方法中抛光剂与材料去除深度的理论关系,设计了微晶玻璃超光滑抛光过程中的抛光剂选型试验。通过比较基片的表面质量,摸索出适合微晶玻璃超光滑抛光的最佳抛光剂为金刚石微粉,成功加工出了超光滑微晶光学元件,其表面粗糙度达到0.2nm。更多还原

【Abstract】 By studying on the principle of the traditional optical cold processing,the theoretical relationship between polishing power and the removed depth of material is analyzed.An experiment about ultra-smooth polishing of glass ceramic is designed.By comparing the results of substrate surface quality,the optimal processing parameters of ultra-smooth glass-ceramic processing are worked out.The ultra-smooth optical components are successfully fabricated,whose surface roughness could be reach at 0.2nm.更多还原