【摘要】 提出了一种基于微机电系统(MEMS)技术的水平轴光纤加速度传感器,并与Z轴光纤加速度传感器在同一MEMS芯片上制造,形成单一方向出纤的三轴光纤加速度传感器。分析了器件工作原理和器件结构参数与其性能的关系,利用MEMS技术成功制作出了加速度传感器样品。初步测试结果表明,本光纤加速度传感器灵敏度为164mV/g,3dB带宽的截止频率为1 600Hz。更多还原

【Abstract】 Fiber optic acceleration sensors are important acceleration sensors,which are widely used in the national economy and national defense industries.In this paper,we present a micro-electro-mechanical system(MEMS)-based horizontal axis fiber-optic acceleration sensor,which can be integrated with the Z-axis optical fiber acceleration senor to form a monolithic three-axis optical acceleration senor whose optical fiber outlets are in the same direction.The sensing theory has been proposed and the MEMS acceleration sensor chip has been fabricated and packaged successfully.The preliminary test results show that the sensitivity of MEMS-based fiber-optic acceleration sensor is 164mV/g,and the 3dB bandwidth is 1 600 Hz.更多还原