【摘要】 设计并研制了一种单色透射式硅基液晶微显示器,详细论述了透射式硅基液晶微显示器的整个研制工艺流程。为实现透射式结构,驱动背板芯片采用SOI CMOS工艺设计并且流片;使用两次键合的工艺完成了驱动背板芯片硅外延层的剥离和转移,掌握了实现透明背板的关键技术;以此透明背板为驱动基板完成了SXGA单色透射式硅基液晶微显示器的研制。更多还原

【Abstract】 In this study a monochrome transmissive LCoS micro-display has been designed and fabricated.The entire process of fabrication has been discussed thoroughly.In order to realize transmissive structure,backplane with driver was designed and fabricated with SOI CMOS technology.Lifting-off and transferring epitaxial layer of driving IC has been achieved by two bonding steps.Based on these,,the SXGA monochrome transmissive LCoS micro-display was accomplished successfully.更多还原