【摘要】 为了了解双向温度梯度作用下Cz液池内复杂流动和传热特性,利用有限容积法对底部施加不同垂直热流密度(3.0~4.0 W/cm~2)的Cz结构内硅熔体流动进行了三维数值模拟。结果表明,当3.0 W/cm~2≤q≤3.4 W/cm~2时,液池内为稳态轴对称流动,自由表面上温度波动呈直辐条结构,液池内最高温度出现在坩埚侧壁(即T_h);当3.6 W/cm~2≤q≤4.0W/cm~2时,流动失稳,液池内总体温度水平提高,最高温度高于壁面温度,其出现的位置离开壁面逐渐向液池中心移动。更多还原

【Abstract】 In order to understand the characteristics of fluid flow and heat transfer in Czochralski configuration with bidirectional temperature gradients,we conducted a series of three-dimensional numerical simulations of the marangoni-thermocapillary flow of silicon melt using the finite-volume method.The bottom of the crucible is heated with a varying heat flux q(3.0 ~4.0 W/cm~2).The simulation results show that the steady three-dimensional flow occurs with the stationary spoke pattern on free surface while the heat flux is small(3.0 W/cm~2 ≤ q ≤3.4 W/cm~2) and the flow becomes oscillatory three-dimensional flow with a larger heat flux(3.6 W/cm~2≤ q ≤4.0 W/cm~2).The increasing heat flux has an effect on the flow structures and it also contributes to the elevation of the melt temperature.And the location of the highest temperature of the pool was discussed.更多还原