【摘要】 精密定位技术在产品精密加工、精密检测中发挥着重要作用。本文介绍了一种利用直线电机驱动气浮平台实现精密定位的方法,阐述了气浮平台工作原理及设计方案,推导了直线电机的控制模型,并利用新型驱动器实现了闭环控制。最后采用LenScan镜面定位仪对平台定位数据进行了比对,验证了定位平台定位的准确性。结果表明该平台结构可靠、系统运行稳定,X、Y方向精度均达到微米级,满足使用要求。现已应用在对半导体器件几何参量的测试中,效果良好。更多还原

【Abstract】 The precision positioning technology plays an important role in products precision machining,precision testing.A method of precision positioning with air-bearing platform driven by linear motor is introduced in this paper.The working principle and designing plan of air-bearing platform are described.The control model of the linear motor is given.And then a closed-loop control is achieved with this new driver.Finally,platform location data were compared with LenScan position device,and the accuracy of the positioning platform is verified.The result shows that the platform structure is reliable and the system is stable.That the accuracy of Xand Y directions is micrometer lever and meets the requirement.Now it is used in testing of geometry parameters of semiconductor devices,and the effect is good.更多还原