【摘要】 用分析纯Ba(OH)2·8H2O和Sr(OH)2·8H2O配制电解液,采用微弧氧化法在工业纯钛板(99.5%)表面原位生成BaxSr(1-x)Ti O3铁电薄膜。研究了Ba2+/Sr2+对薄膜晶体结构、物相组成、表面形貌及表面粗糙度的影响,并对薄膜的介电、铁电性能进行了表征。结果表明,Ba2+/Sr2+对薄膜晶体结构无影响,但随Ba2+含量增加,BaxSr(1-x)Ti O3薄膜中x值与理论值偏离越大;随电解液浓度及Ba2+/Sr2+增加,薄膜表面变得疏松,散布的颗粒尺寸增大,表面粗糙度值增加。在Ba2+和Sr2+各为0.2 mol/L时所得薄膜表面平整度及致密性最好,表面粗糙度值最小,其在100 Hz条件下的介电常数为454.8,且具有饱和电滞回线,有较好的商业化应用前景。更多还原

【Abstract】 BaxSr(1-x)Ti O3(BST) thin film was fabricated by microarc Oxidation(MAO) in an aqueous solution containing barium hydroxide and strontium hydroxide. The influence of the ratio of Ba2+/Sr2+ was studied on the crystalline structure, phase composition and morphology of the BST film. It is found that the BST films are composed mainly of tetragonal BaxSr(1-x)Ti O3, in which Ba2+ ions are more easily incorporated than Sr2+ ions. The BST films are getting rougher with the increase of the electrolyte concentration and the ratio of Ba2+/Sr2+. The BST film has the smoothest and densest surface when prepared by using an optimized solution containing 0.2 mol/L Ba(OH)2 and 0.2 mol/L Sr(OH)2, which possesses high dielectric constant of 454.8 at the frequency of 100 Hz and exhibits a saturated electric hysteresis loop, thus showing a potential commercial application.更多还原