【摘要】 利用磁控溅射法制备得到二氧化钛薄膜,将薄膜在高温管式炉中分别进行退火,利用XRD、AFM和紫外-可见光谱仪研究了不同温度下退火前后薄膜的晶相结构、光学性能和光催化性能。结果表明,随着退火温度的升高二氧化钛的晶相由锐钛矿向金红石转变,600℃时为两相共存,表面颗粒大小也会有相应变化,锐钛矿相表现出了更好的光催化性能。更多还原

【Abstract】 TiO₂ thin films were prepared by a magnetron sputtering technique and then annealed at different temperatures.The crystal quality,surface morphology,optical absorption and photocatalytic performance of the as deposited and annealed films were characterized and compared by XRD,AFM and ultraviolet-visible spectrometer.The results show that with the increase of annealing temperature,the TiO₂ phase turns from anatase to rutile,while at 600 ℃,two kinds of phase coexist.During the annealing process,the grain sizes of the TiO₂ films change simutaneously.Compared with rutile,anatase phase presents better photocatalytic performance.更多还原