【摘要】 为了研究Ti-Zr合金薄膜厚度对其结构的影响,通过磁控溅射沉积技术在7105载玻片上制备了不同厚度的Ti-50%Zr(原子分数)合金薄膜。利用X射线衍射(XRD)、X射线吸收精细结构谱(XAFS)和X光电子谱(XPS)技术研究了Ti-Zr合金薄膜的晶体结构、元素局域结构和电子结构状态。结果表明,随着Ti-50%Zr薄膜厚度的减小,薄膜由结晶态变为非晶态,薄膜中元素的最近邻原子距离和配位数减小,薄膜中元素的电子结合能逐渐增强。更多还原

【Abstract】 Ti-50%Zr films with different thickness were prepared by magnetic sputtering deposition on 7105 glass slide.The crystal structure,atomic local structure and electron structure of the films were investigated using X-ray diffractometer(XRD),X-ray absorption fine structure(XAFS) and X-ray photoelectron spectroscopy(XPS),respectively.Results showed the crystal structure changed from crystalline state into amorphous state with the decrease of the film thickness.And the distance and coordination number of nearest neighbor atoms were also reduced and the binding energy of Ti and Zr in the films increased with the decrease of the thickness.更多还原