【摘要】 利用MEMS工艺,设计并制作了一种梳齿推挽驱动的微型磁场传感器。在器件工作时,磁传感器的谐振振子工作在收缩或扩张的模态,进而引起谐振振子上的双层铝线圈包围面积发生变化,即回路线圈中的磁通量发生变化。根据电磁感应原理,将会在线圈的两端产生正比于磁场强度的感应电压。推挽驱动结构设计增加了谐振器驱动力,提高了磁传感器的灵敏度。实验结果表明:磁传感器在大气环境下的灵敏度为0.846 99 m V/T,非线性度为-0.265%。由于传感器采用差分检测电路,减小了磁传感器的零偏电压,零偏输出电压仅为0.001 9 m V。更多还原

【Abstract】 Based on the MEMS technology,a comb-shaped push-pull driving micro-magnetic sensor is designed and fabricated. When measuring the external magnetic field,the resonator of sensor works in contracting and extensional modal,therefore the surrounding area by double-layer Al coils will change,as a result,magnetic flux in loop coils vary. According to the principle of electromagnetic induction,induced electromotive force will generate proportional to magnetic field at the two terminals of the coils. The experimental results show that the sensitivity of magnetic sensor in air environment is 0. 846 99 m V / T,and the nonlinearity is-0. 265 %. Using the differential circuit,reduce the zero offset voltage of magnetic sensor,which is only 0. 001 9 m V.更多还原