【摘要】 为了降低偏心驱动对气浮支承精密运动平台的精度和稳定性的影响,建立了偏心驱动下运动平台的理论分析模型。采用无量纲的偏心率表征驱动力位置和检测位置的偏心,分析了偏心率对系统稳定性和精度的影响规律。根据实际精度和稳定性指标要求,提出了偏心率设计准则,即在设计精度决定的控制带宽下,保证合理的稳定性裕度,偏航和俯仰方向偏心率的控制范围。所提方法已用于气浮支承精密运动平台的设计,试验结果表明运动平台的位置跟踪误差在设计要求内。更多还原

【Abstract】 A theoretical model of precision motion stage with air bearings under eccentric driving force is set up in order to reduce its influence on accuracy and stability of the system. The dimensionless eccentricity is taken to represent the relative distances between center of gravity and driving force. The influence of eccentricity on stability and accuracy is analyzed. Design criterion of eccentricity is proposed to satisfy the given stability and accuracy. In order to keep reasonable margin of stability,eccentricity of both pitch and yaw should be kept in the range calculated by control bandwidth,which is determined by the given accuracy. The method is used in design of precision motion stage with air bearings,and its experimental result shows that this method is used to meet the given requirements of the stage position error.更多还原