【摘要】 研究了退火工艺对金属-绝缘体-金属(MIM)器件(Al-Al2O3-Ti/Au结构)的发射特性的影响。在对MIM器件Ti/Au顶电极进行退火处理后,金属离子渗入绝缘层形成掺杂,器件发射电流密度提高,有效发射面积增大,并有较高发射效率,在加速电压200 V,器件偏置电压13.5 V时电子发射电流密度达到1056.6μA/cm2,最大发射效率为4.7%,最优退火温度为300℃。在对MIM器件的Al底电极进行退火处理后,可以减小电化学氧化的电解质掺杂,提高器件发射寿命,器件工作于非电形成状态,电子发射电流密度波动小。对Al底电极的单独退火可使器件同时具有发射大、稳定性好的优点,在提高MIM发射性能的同时,缩短了器件制备周期。更多还原

【Abstract】 The Al-Al2O3-Ti / Au metal-insulator-metal( MIM) cathode was fabricated on glass substrate. The Ti / Au top and Al base electrodes were separately deposited by magnetron sputtering and annealed in nitrogen environment to investigate the impact of the annealing conditions on the electron emission characteristics of the MIM cathode. The results show that the annealing under the optimized conditions of the Ti / Au top and Al base electrodes significantly improves the electron emission characteristics and its lifetime. For instance,after the Ti / Au top electrode was annealed at300℃ for 15 min,the emission current density increased with a larger effective emission area and a higher emission efficiency of the cathode. Biased at 13. 5 V and accelerated at 200 V,the emission current density and highest emission efficiency were found to be 1056. 6 μA / cm2 and 4. 7%,respectively,possibly because metal impurities diffused into the insulator layer. The annealed Al base electrode resulted in stronger electron emission,longer lifetime,and better stability of the cathode,simply because of reduction of electrolyte-doping in electrochemical oxidation.更多还原