【摘要】 采用粉末冶金和真空熔炼方法制备了原子比为Ti50Al50的合金靶材,利用磁控溅射工艺在同一工艺参数下制备了TiAlN涂层,借助扫描电镜、原子力显微镜、X射线衍射仪、纳米压痕和结合强度实验,研究了溅射靶材对TiAlN涂层的形貌、结构和力学性能的影响。结果表明:粉末靶材中Ti和Al以单质相存在,Ti镶嵌于Al基体周围,熔炼靶材中形成了TiAl和Ti3Al合金化片层组织;由于两种靶材在组织结构和导热性能上的不同导致其溅射产额、靶材温度和溅射金属离子能量等都出现了明显的差异;对涂层的影响表现为,相比于熔炼靶材涂层,粉末靶材涂层的沉积速率高44%,表面粗糙度低24%,涂层表面熔滴数目和尺寸较小;粉末靶材涂层呈现Ti2AlN相等轴晶生长方式,熔炼靶材涂层由于沉积温度较高表现为Ti2AlN相和TiN相,以等轴晶和柱状晶混合生长;相结构的不同导致涂层的硬度和结合强度出现差异,粉末靶材涂层硬度为25.69 GPa,结合强度属于HF-3,熔炼靶材涂层的硬度为28.22 GPa,结合强度属于HF-5。更多还原

【Abstract】 Two types of TiAlalloy targets,Targets A and B,were fabricatedbypowder metallurgy and vacuum smelting,respectively.The TiAlN coatings were synthesized by reactive magnetron sputtering of different TiAl alloy targets.The coatings were characterized with X-ray diffraction,scanning electron microscopy,atomic force microscopy and conventional mechanical probes.The results show that the target type strongly affects the microstructures,phase structures and mechanical properties of the TiAlN coatings.For example,Target-A resulted in 44% higher deposition rate,24% lower surface roughness,smaller and fewer metallic micro-droplet than Target-B.Deposited with Target-A,the TiAlN coatings consisted of stable single-phased columnar Ti2 AlN grains,while synthesized with target-B,the coatings contained Ti2 AlN and c-TiN phases.Besides,when it comes to hardness and interfacial adhesion,the smelted target outperforms the"powder target"possibly because of their differences in texture and thermal conductivity.更多还原