【摘要】 采用射频磁控倾斜共溅射制备了一系列的(Fe40Co40B20)1-x(Al2O3)x软磁颗粒膜。分别研究了基片转速及溅射气压对FeCoB–Al2O3薄膜微波磁特性影响。并通过改变FeCoB靶以及Al2O3靶的溅射功率进一步调控了软磁颗粒膜的磁特性和电阻率。研究结果表明在基片转速为60 r/min,溅射气压为0.2 Pa,FeCoB靶的溅射功率为250 W,Al2O3靶的溅射功率为100 W时,获得的FeCoB-Al2O3软磁颗粒膜具备了优良的软磁特性、微波磁特性和较高的电阻率。薄膜的饱和磁化强度为1.73 T,易轴难轴矫顽力均小于80 A/m,电阻率为126.75μΩ·cm,共振频率高达2.22 GHz,磁导率实部在2 GHz仍大于400。更多还原

【Abstract】 A series of( Fe40Co40B20)1-x( Al2O3)xnano-granular soft magnetic thin films were synthesized on glass substrate by rf magnetron co-sputtering at an oblique incident angle. The effects of the rotation speed of substrates and the pressure on the microwave characteristics of the as-deposited FeCoB Al2O3films wereinvestigated.The sputtering powers of the FeCoB and Al2O3targets were varied to better adjust and control the magnetic characteristics and the resistivity of thefilms. Grown under the optimized conditions,the FeCoB Al2O3films exhibit excellent properties,such as a high saturation magnetization of 1. 73 T,a coercive force below 80 A /m,a resistivity of126. 75 μΩ·cm,a high ferromagnetic resonant frequency of 2. 22 GHz. Moreover,the real part of permeability was found to be above 400 at 2 GHz.更多还原